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Mr. Ian Wright

Regional Marketing Director for Asia
SPTS

Profile

Ian Wright is the Regional Marketing Director for Asia at SPTS Technologies.

He supports the regional offices and customer activities across all product groups, including the development of new business opportunities. Ian is a 20-year industry veteran who has been involved in the development of DRIE applications for MEMS and Optics, amongst others market segments.

He has a Bachelor's degree in Mechanical Engineering and more than two decades of experience in plasma process equipment industry, formerly at STS and now SPTS. At STS, Ian was responsible for managing the company’s sales, marketing and support activities in Asia (excluding Japan). With SPTS, he was Sales Director for Southeast Asia till he took on the current role in 2011.

Ian is based in Singapore, and is a keen triathlete.

MEMS Device Release With In-Situ Wafer Level Encapsulation - SPTS' Multi-Technology Approach

Abstract

The requirement to encapsulate MEMS components in vacuum is well known for numerous reasons; Q-factor degradation, capacitance changes, etc as well as protection from particles and potentially dicing slurry during backend processing.

For surface and bulk micromachined devices there is increased interest in the use of a thin film cap of Poly-Si, dielectric or metal with release holes for sacrificial material removal followed by a sealing step of similar materials for hermetic sealing.The sacrificial etch and capping steps can be done either in discrete steps or now as a multi-step process on the same platform without breaking vacuum.

SPTS will present the potential to integrate their Si and SiOx release technologies with both PECVD and PVD processes on the SPTS Versalis platform