The undersigned hereby assigns to SEMI unconstrained rights to publish, print or copy the above work in any form.
The undersigned understands that the copyright will be held by SEMI for organizational reasons except in the cases of certain Government Employees.
The undersigned hereby warrants that the work is original and that he/she has the power and authority to make and execute this assignment.
Author(s) and Employers retain all proprietary rights in any process; procedure or article of manufacture described in the work and similarly have unrestricted rights to reuse this work within their organizations or for themselves and in other derivative works.
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